About

The Laboratory of Micro and Nanofabrication of UFV (LabMinas-UFV) includes a clean room facility (ISO 4) dedicated to production and characterization of high quality nanostructures, such as thin films, 2D materials, self-assembly nanostructures, quantum dots, quantum wells, among others. This laboratory gives particular support to the development of projects of research centers as well as of technology-based companies.

The project of construction of cleanroom facility started in the late 1990s, where the first photolithography tools and equipment such as maskaligner, spin coater and chemical fumes were acquired. At that time, the first works concerning the production and characterization of semiconductor devices totally produced in UFV were performed. It was of fundamental importance to formation of human resources from UFV in the 2000s. Over the next years, a lot of equipment were acquired by Departament of Physics, at the same time that the number of researchers and students has increased substantially. In the year of 2018 the clean room was restructured, today having electrodeposition systems, dry etching, wet etching, optical profilometry, e-beam lithography and sputtering deposition